Products
HEPA Filter
SPleats Panel type/Cell type filter is constructed by the mini pleat pack. It is thin, light weight and high efficiency. The filter has low pressure drop and outstanding air velocity due to the use of glass yarn.
Chemical Filter
GIGASORBTM, it's designed in three dimensional filament structure with solid BAC (Beads shaped Activated Carbon), aiming at low pressure drop hence high efficient.The property of GIGASORBTM is better fit to make best clean room environment for super fine processing of LSI.
Boron Free, Low Boron and Low Organic Compounds Air Filter
LB / LO/ LL HEPA / ULPA LB / LO/ LL ULPA The media use low boron / low organic compounds glass fiber paper. PTFE PTFE FILTER use super micro fiber polymer media, it has the low pressure drop and high efficiency performance. Due to it's fluorocarbon polymers characterics, it's boron free.
ULPA Filter
SPleatsTMPanel type filter is constructed by the mini pleat pack. It is thin, light weight and high efficiency. The filter has low pressure drop and outstanding air velocity due to the use of glass yarn.
Medium Filter
Cell type Medium filter has V-shape structure with mini-pleated media pack so that it has more than double media area compared to conventional type,as a result, it has high capacity and long life.